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来源：百度知道 编辑：UC知道 时间：2024/05/22 01:05:57
It is one object of the present invention to provide organometallic precursor compounds suitable for the chemical deposition of metals such as those of Groups VIIb, VIII, IX, and X. It is an object to provide preferred organometallic compounds of metals of Groups VIIb, VIII, IX, and X with relatively high vapor pressures and good thermal stability such that they are vaporizable without substantial decomposition. It is an object of one embodiment of the present invention to provide preferred organometallic compounds lacking metal-carbon bonds, which are suitable for use in chemical vapor deposition methods, whereby high purity metals or metal derivatives such as for example, metal suicides may be formed.
It is one object of another aspect of the present invention to provide novel organometallic compounds having relatively high vapor pressures and good thermal stability such that they are vaporizable without substantial decomposition.
It is one object of yet another aspect of
It is one object of another aspect of the present invention to provide novel organometallic compounds having relatively high vapor pressures and good thermal stability such that they are vaporizable without substantial decomposition.
It is one object of yet another aspect of
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只能提供给你机器翻译的了,参考一下吧
这是一本发明对象提供适合有机金属化学沉积前驱物金属 诸如团体VIIB部,第八、第九、 十、为首选对象是金属有机化合物群体VIIB部,第八、第九、 与X具有较高蒸汽压和良好的热稳定性,使他们无实质性vaporizable分解. 这是一项体现一个对象本发明提供首选有机化合物缺乏金属碳债券 它适合使用化学气相沉积法 而高纯度金属或金属衍生物如例如金属自杀可能形成.
这是一本对象的另一个方面提供发明新型有机金属化合物具有较高的蒸气 这种压力和热稳定性好,他们是没有实质vaporizable分解.
这是一个对象方面的又一本发明提供化学方法沉积矿床影片 金属或金属衍生物衍生金属集团VIIB部,第八、第九、第十各基板, 包括硅和砷化镓(砷化镓)等,形成金属及金属粉末衍生形式. 这是一个对象提供这方面的首选方法发明制作金属和金属衍生物 例如,作为电影silcide高纯度金属、 其中尤其以避免污染影片碳和/或氧气. 它是这方面进一步面向本发明提供有益的首选方法反补贴 制作设备质量基于金属集团VIIB部影片,氢或氘; R2中说,其中团体都不尽相同.